Abstract—Benzocyclobutene (BCB 4022-35) polymer thin films were fabricated by spin coating technique in this work. Final thicknesses and refractive indices of BCB films for various coating speeds and curing times were characterized by prism coupling system (Metricon-2010) and profilometer (Dektak-3030ST). Final thicknesses of BCB thin films were changed from 2.60 to 5.22 μm. Refractive indices of BCB thin film at 632.8 nm and 1553 nm was 1.5845 and 1.5606 respectively. In addition, extent of curing for BCB thin films was determined by FT-IR spectrometer. As a result of this study, the basic features of BCB thin films were high accuracy determined. The BCB thin films that fabricated high quality are a suitable material for optical applications. This knowledge allows the fabrication of optical waveguides.

Index Terms—Benzocyclobutene (BCB 4022-35), refractive index, spin coating method, thin film

Cite: Fikret G. Aras, E. Oz Orhan, and I. Karaçali, "Benzocyclobutene (BCB 4022-35) Polymer Thin Films by Spin Coating Method," Lecture Notes on Photonics and Optoelectronics , Vol.1, No.1, pp.9-13,  June 2013. doi: 10.12720/lnpo.1.1.9-13